Filtration For Solar Cell Manufacturing
Author：管理員 Dtime：2012-12-06 19:47:08
Memo：Filtration For Solar Cell Manufacturing
| Fluids | Application | Filter Recommendations | Comments | | GASES | | | | Facitilites | POU | | | H2 | CVD,PECVDorMOCVD | SAYES TFP Series | | Discuss benefits with customers | | Ar | CVD, PECVD,PVD,sputtering | SAYES TFP Series | | N2 | CVD,PECVD ,CSS | SAYES TFP Series | | He | CVDorPECVD | SAYES TFP Series | | NH3 | CVDorPECVD | SAYES TFP Series | | O2 | PVD, | SAYES TFP Series | | (Trichloro)Silane | CVDorPECVD | SAYES TFP Series | | Diborane | CVDorPECVD | SAYES TFP Series | | Phosphine | CVDorPECVD | SAYES TFP Series | | SiH4, GeH4, CH4 | PEVCD | SAYES TFP Series | | DI WATER | | Pre RO | | SAYES MBE Series | | 5um | | Resin Trap | | SAYES MBE Series/PPP Series | | 1-3um | | POU | rinsing,cleaning,dilution | | SAYES PESG Series | 0.1-0.2um | | WASTEWATER | | | from wafer shaping ? curring | SAYES SWE Series | | | CHEMICALS | | HF | etching,cleaning | SAYES PESE Series | | 0.1,0.2 or even 1um for all chemicals | | HNO3 | etching,cleaning | SAYES TFP Series | | | H2PO4 | etching | SAYES TFP Series | | | Acetic Acid | etching,cleaning | SAYES TFP Series | | | NaOH | etching,cleaning | SAYES PPP Series/PESG Series | | | KOH | etching,cleaning | SAYES PPP Series/PESG Series | | | IPA, | etching,cleaning | SAYES PPP Series/NL Series | | | HCl | cleaning | SAYES PPP Series/PESG Series | | | POCL3 | n-doping | SAYES TFP Series | | | SC1/SC2 | cleaning | SAYES TFP Series | | | Electroless Plating Soln | Front,contact | SAYES TFP Series | | | SnCl4 solutiln. aq. | formation of SnO2 contact | SAYES PPP Series/PESG Series | | | SLURRY | | Silicon carbide +PEG | wafer slicing | SAYES MBE Series/SWE Series | 5um | | METAL PASTES | | Silver ,Aluminum | screen-printing | SAYES PPP Series | If necessary |
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